Toward large-scale nonvolatile electrically programmable photonics with deterministic multilevel operation

We introduce a scalable platform designed for very-large-scale programmable photonics, achieved through the integration of 300-mm-wafer-scale fabrication processes and in-house phase-change material fabrication. This approach enables reversible electrical tuning capabilities up to 50, 000 switching events. Moreover, we demonstrate a deterministic multilevel scheme capable of achieving 2^N optical levels, offering enhanced control and versatility in programmable photonics applications.