Integrated Deep-Ultraviolet Micro-LED Array With Ultralow Contact Resistance and Ultrahigh Bandwidth for Intermixed Solar-Blind Optical Wireless Communication
In this work, we report an integrated deep-ultraviolet (DUV) micro-LED array consisting of two distinct device sizes: one is <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$35\times 35~\mu $ </tex-math></inline-formula>m2 and the other is <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$100\times 100~\mu $ </tex-math></inline-formula>m2 (namely, 35-<inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$\mu $ </tex-math></inline-formula>m-LED and 100-<inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$\mu $ </tex-math></inline-formula>m-LED), which are fabricated with a shared common n-type electrode. Under individual device tests, we revealed that both 35-<inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$\mu $ </tex-math></inline-formula>m-LED and 100-<inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$\mu $ </tex-math></inline-formula>m-LED possess ultralow contact resistances of only <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$51~\Omega $ </tex-math></inline-formula> and <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$13~\Omega $ </tex-math></inline-formula>, respectively, while also exhibiting high bandwidth values of 527 MHz and 372 MHz, respectively, obtained in DUV optical wireless communication (DUV OWC). These values are among the best-reported values in the literature for similar micro-LEDs. Essentially, by integrating these two types of micro-LEDs on a single chip, we successfully demonstrated intermixed signal transmission and communication, which has great potential for future secured DUV OWC applications.
Authors
- Haiding Sun (ORCID: https://orcid.org/0000-0001-8664-666X)
- Huabin Yu (ORCID: https://orcid.org/0000-0003-2487-2076)
- Yuchen Du (ORCID: https://orcid.org/0000-0002-2971-4774)
- Yuanmin Luo
- Zhixiang Gao (ORCID: https://orcid.org/0000-0002-7568-3833)
- Muhammad Hunain Memon (ORCID: https://orcid.org/0000-0002-3970-8925)
- Yang Kang
- Rui Wang (ORCID: https://orcid.org/0000-0003-0044-8932)
- Zeyu Tang
Institutions
- University of Science and Technology of China (CN)
Publication Details
- Journal
- IEEE Electron Device Letters
- Published
- 2024-10-02
- DOI
- https://doi.org/10.1109/led.2024.3472009
- Citations
- 10
- Primary Topic
- Optical Wireless Communication Technologies
- Type
- article
- Field-Weighted Citation Impact
- 2.09
Funders
- University of Science and Technology of China
- National Key Research and Development Program of China