Simulation and Analysis of MEMS-Based Flexible Capacitive Pressure Sensors with COMSOL

We employ COMSOL Multiphysics to develop and analyze a novel tri-layered MEMS-based capacitive pressure sensor. The sensor comprises gold electrodes, a composite dielectric layer consisting of silver nanowires (AgNWs) embedded in thermoplastic polyurethane (TPU), and a polydimethylsiloxane substrate. This study investigates the impact of variations in design parameters of the AgNW/TPU dielectric layer – specifically thickness and area – on sensor performance from 0 Pa to 15 kPa. The focus is on the sensor's response across different pressure levels, particularly at the maximum of 15 kPa. Preliminary simulation results indicate potential for performance enhancement. Future work will further optimize sensor sensitivity and accuracy by simulating additional three-dimensional dielectric layer configurations.