A Comprehensive Framework for the Self-Heat Enhanced BTI and HCD Isolation

Contributions due to bias temperature instability (BTI) and hot carrier degradation (HCD) in the presence of self-heating (SH) on parametric shift are analyzed in gate-all-around stacked nanosheet (GAA-SNS) p- and n-FETs. The BTI analysis tool (BAT) models the time kinetics of pure BTI during and after stress at different gate bias (<inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">${V} _{\text {G}}$ </tex-math></inline-formula>) and temperature (T), and changes in the presence of drain bias (<inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">${V} _{\text {D}}$ </tex-math></inline-formula>) due to a reduction in vertical field (<inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">${E} _{\text {VRT}}$ </tex-math></inline-formula>) and lattice T increase due to SH. The HCD analysis tool (HCAT) models the time kinetics of pure HCD during and after stress at different <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">${V} _{\text {G}}$ </tex-math></inline-formula>, <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">${V} _{\text {D}}$ </tex-math></inline-formula>, and T. The decoupling methodology helps isolate and project BTI and pure HCD contributions to overall HCD at end of life (EOL) at different <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">${V} _{\text {G}}$ </tex-math></inline-formula>, <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">${V} _{\text {D}}$ </tex-math></inline-formula>, and T. Comparison is made to blanket HCD projection to EOL without decomposition of BTI.