CAPACITIVE SENSORS WITH ULTRA-SMALL CAPACITANCE FOR SMART MEASUREMENT AND CONTROL SYSTEMS

This article discusses methods of low capacitance measurement of capacitive sensors. The results of the study of the amplitude-frequency (AF) and phase-frequency (PF) response of measurement circuits of capacitive sensors for low capacitances measurement, consisting of RC - differentiating elements are presented. The input and output parameters of the differentiating circuit and the complex transfer function are analyzed. The research results show that low capacitances measurement by measuring the rectangular pulses duration is the most effective measurement method.