Performance of planar pixel modules for the CMS Phase-2 Inner Tracker

During the Long Shutdown 3, the CMS pixel detector will be replaced to operate during the High Luminosity LHC (HL-LHC) running phase. Hybrid pixel modules of the new tracking detector will have to fulfill stringent requirements to operate in an extremely harsh radiation environment and cope with the high data readout rate. Sensor-readout chip assemblies have been extensively tested in the laboratory and at the DESY test beam facility. This study presents results on the analysis of test beam data acquired with HPK planar pixel sensors interconnected with the RD53B_CMS readout chip, irradiated to fluences up to Φ eq = 1 . 0 × 1 0 16 cm − 2 . For all investigated fluences, the requirements for the efficiency times acceptance and the spatial resolution are met, while keeping the percentage of pixels masked as noisy below 1%. Additionally, measurements of crosstalk levels will be presented.