Fabrication of InP Vertical Gate-All-Around Transistors Using Crystal Phase Transition Heterojunction
The crystal phase heterojunction (CPHJ) is essentially a new type of heterojunction without misfit dislocations and lattice relaxation. The transistor structure using the CPHJ could significantly impact the transistor technologies. However, CPHJ has difficulty in fabricating a gate structure that modulates the electric field normal to the the CPHJ. Here, we report on the selective-area growth of WZ-InP NWs for InP NWs and demonstration of vertical gate-all-around transistors using the InP CPHJ.
Authors
- Katsuhiro Tomioka (ORCID: https://orcid.org/0000-0003-3482-2371)
- Junichi Motohisa (ORCID: https://orcid.org/0000-0001-9529-4299)
- Ziye Zheng (ORCID: https://orcid.org/0000-0002-0545-2781)
- Yuki Takeda
- Ryosei Uchida
- Yuki Azuma
Publication Details
- Journal
- ECS Transactions
- Published
- 2024-09-27
- DOI
- https://doi.org/10.1149/11404.0023ecst
- Primary Topic
- Semiconductor Quantum Structures and Devices
- Type
- article
- Field-Weighted Citation Impact
- 0.00