Finding Diffusivity and Solubility of Impurities inside ILs By MD

Ionic liquids (ILs) are promising candidates for use in the semiconductor industry due to their unique and tunable physicochemical properties. One possible application is to use ILs as a barrier or protective liquid film that does not evaporate in low-pressure conditions. For this application, we need a better understanding of the molecular scale of the behavior of the ILs at different temperature ranges. To develop such a new process, the knowledge of absorbing/desorbing impurities (such as O 2 , CO 2 , and H 2 O, including their mixtures and other organic materials) in the ILs and their transport properties (diffusion coefficients) inside the ILs at different temperatures is essential from the surface protection film point of view. This work seeks to answer these essential questions at the nanometer scale by showing the results from molecular dynamics (MD) simulations of the diffusivity and solubility of impurities inside ILs.