Prediction model of material removal rate and surface roughness for silicon single crystal EDM

To solve the problem that the material removal rate and surface roughness can not be accurately predicted in electrical discharge machining (EDM), the temperature field, melting and solidification process of silicon single crystal in single pulse EDM are simulated, and the morphology and size of a single erosion crater is obtained. The predicted values for surface roughness (SR) and material removal rate (MRR) of machined silicon single crystal are derived from calculations using a continuous pulse discharge model. Experimental results indicate that the relative error between the predicted and experimental values for the MRR is 5.4%, and the relative error for the surface root mean square roughness is 6.2%, which verifies the accuracy of the model.

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Publication Details

Published
2024-09-27
DOI
https://doi.org/10.1117/12.3046639
Primary Topic
Advanced Machining and Optimization Techniques
Type
article
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article

Prediction model of material removal rate and surface roughness for silicon single crystal EDM

Yuhang Zhou, Xincheng Yin, Shujuan Li, Youliang Wang et al.
Advanced Machining and Optimization Techniques
article

Prediction model of material removal rate and surface roughness for silicon single crystal EDM

Yuhang Zhou, Xincheng Yin, Shujuan Li, Youliang Wang, Haiwang Liu
article en

Abstract

To solve the problem that the material removal rate and surface roughness can not be accurately predicted in electrical discharge machining (EDM), the temperature field, melting and solidification process of silicon single crystal in single pulse EDM are simulated, and the morphology and size of a single erosion crater is obtained. The predicted values for surface roughness (SR) and material removal rate (MRR) of machined silicon single crystal are derived from calculations using a continuous pulse discharge model. Experimental results indicate that the relative error between the predicted and experimental values for the MRR is 5.4%, and the relative error for the surface root mean square roughness is 6.2%, which verifies the accuracy of the model.

Ministry of Education of the People's Republic of China (CN), Lanzhou University of Technology (CN)
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Advanced Machining and Optimization Techniques
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Prediction model of material removal rate and surface roughness for silicon single crystal EDM — Yuhang Zhou, Xincheng Yin, et al. · (2024) | TGRS Research Map | TGRS