Study on mass transfer ability of trapezoidal anode enhanced electrodeposition limited microregion

Electrochemical deposition is often used for the high-quality preparation of metal microstructures. In the past mask electrodeposition, mass transfer in the microregion is difficult when the microstructure with a large height is prepared, and the microstructure forming quality is poor. In this paper, a processing method using trapezoidal anode to enhance the mass transfer ability of the confined microregion of electrodeposition is proposed. In this study, the deposition conditions under the condition of flat anode and trapezoidal anode were compared by simulation and experiment. The results consistently show that under the condition of trapezoidal anode, the metal microstructure roughness is significantly reduced, and the deposition rate is greatly improved, which well proves the enhancement of trapezoidal anode on the mass transfer capacity in the micro-region.