A comparative study of total and partial ionization cross sections, branching ratios and fragmentation patterns of XH₄ (X = C, Si, Ge, Sn, Pb)

Abstract The formation and decomposition of SnH 4 has been recently reported using electron ionization mass spectrometry ( J. Am. Soc. Mass Spectrom . 35 (2024) 1523 and J. Vac. Sci. Technol. A 41 (2023) 063209) due to its importance in tin contamination cleaning in extreme ultraviolet lithography. A comprehensive understanding of the fragment patterns of SnH 4 requires total and partial ionization cross sections of SnH 4 . However, there is limited availability of experimental and theoretical ionization data for SnH 4 . We report the electron-impact ionization fragmentation patterns of XH 4 (X = C, Si, Ge, Sn, Pb) and should provide missing data, especially for SnH 4 and PbH 4 . Total ionization cross sections are calculated using the Binary Encounter Bethe (BEB) method. Partial ionization cross sections and branching ratios are determined using mass spectrum data (MSD) and Huber et al ’s method. Finally, we compare the calculated percentage abundances for the fragments of XH 4 with experimental measurements.