Non-volatile photonic-electronic memory via 3D monolithic ferroelectric-silicon ring resonator
A novel non-volatile photonic-electronic memory, 3D integrating an Al-doped HfO<sub>2</sub> ferroelectric thin film onto a silicon photonic platform using fully compatible electronic and photonic fabrication processes, enables electrically/optically programmable, non-destructively readable, and multi-level storage functions.
Authors
- Hang Chen (ORCID: https://orcid.org/0000-0001-9999-1358)
Institutions
- Tsinghua University (CN)
Publication Details
- Journal
- Light Science & Applications
- Published
- 2024-09-26
- DOI
- https://doi.org/10.1038/s41377-024-01625-9
- Primary Topic
- Neural Networks and Reservoir Computing
- Type
- article
- Field-Weighted Citation Impact
- 0.00