Spatial resolution limit for a solid immersion lens

The solid immersion (SI) effect is widely used to increase the spatial resolution of optical focusing systems and even overcome the Abbe diffraction limit. Resolution enhancement offered by a SI lens is mostly a function of its geometry and refractive index n SI . While SI lenses are relatively well understood, the scaling of the resolution enhancement by such lenses is still a subject of debate, with some works reporting ≃ n SI and ≃ n SI 2 dependencies for the hemispherical and hyperhemispherical SI lens configurations, respectively. In this paper, we offer a general argument for a resolution limit for SI optics and, then, verify it via the numerical analysis of the hemispherical and hyperhemispherical silicon SI lenses designed for the terahertz (THz) range. In fact, we find that there is no contradiction in the reported resolution enhancements ≃ n SI and ≃ n SI 2 ; however, they happen in different operation regimes. We then demonstrate that the resolution values reported for the different SI lens arrangements in the visible (VIS), near-, and middle-infrared (NIR and MIR), as well as THz bands obey the derived limit. Our findings will be useful for the further design and applications of SI optics.