Fundamental Study on Oblique Impact Drive Stage for Ultra Precision Positioning

A new ultra-precision positioning system is introduced in this paper. Experiment results show that using oblique impact drive, stage can be positioned in one axis as well as rotated around one axis by one actuator, that is, 'One-actuator-two-motion'. This means that simpler positioning system is possible, resulting in compact system, less components, more reliability, less costly system, which lead to SDGs.