Single-Step and Parallel High-Speed Fabrication for Au Micro/Nano-Structures
Patterns fabricated with Au nanoparticles (Au NPs) exhibit significant potential in fields such as micro-optics and bioelectronics. However, the current manufacturing methods still suffer from complex processes and low efficiency. In this work, we propose a high-speed manufacturing method for Au micro-/nanostructures based on spatiotemporal focusing and maskless lithography, achieving a throughput of 0.5 mm<sup>2</sup>/min. The surface electric field enhancement of the structure was confirmed using Raman spectroscopy, indicating that this method holds significant promise for metasurface, biosensing, and plasmonic chemistry.
Authors
- Mengfei Xiong (ORCID: https://orcid.org/0000-0002-7186-4733)
- Jiebo Li (ORCID: https://orcid.org/0000-0002-2295-6666)
- Sai Chen (ORCID: https://orcid.org/0000-0003-2647-4303)
- Yanzhe Fu (ORCID: https://orcid.org/0000-0001-5519-9705)
- Jiayong Wei (ORCID: https://orcid.org/0000-0002-5447-5832)
- Bing Wang (ORCID: https://orcid.org/0000-0003-3662-7625)
- Xiang Ding (ORCID: https://orcid.org/0009-0002-4840-5229)
Institutions
- Harbin Institute of Technology (CN)
- Beihang University (CN)
Publication Details
- Journal
- Optics Letters
- Published
- 2024-09-16
- DOI
- https://doi.org/10.1364/ol.539524
- Citations
- 1
- Primary Topic
- Nanofabrication and Lithography Techniques
- Type
- article
- Field-Weighted Citation Impact
- 0.18
Funders
- National Natural Science Foundation of China
- Fundamental Research Funds for the Central Universities