Spectral Behavior and Expansion Dynamics of Gd Plasma Generated by Dual-Pulse Laser Irradiation

Laser-produced gadolinium plasma (Gd-LPP) emerges as a promising candidate for next-generation nanolithography light sources. In this study, a dual laser pulse scheme was implemented to achieve a narrow spectral peak. By varying the pre-main pulse delay and pre-pulse laser energy, optimal conditions of 40 ns delay and 50 mJ energy were identified to improve spectral purity. Radiation hydrodynamics simulations revealed that the improved spectral purity stems from a flatter density gradient at the ablation front and a lower average electron density in the EUV emission region. Additionally, reheating the pre-formed plasma with a short main pulse mitigated plasma squeezing, resulting in an even lower electron density and thus improved spectral purity. Our findings suggest that spectral narrowing in the dual-pulse scheme, essential for better matching with multilayer reflection bandwidths, can be optimized through precise control of pre-pulse energy, pre-main delay, and main-pulse duration.

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Publication Details

Journal
Optics Express
Published
2024-09-23
DOI
https://doi.org/10.1364/oe.539682
Citations
1
Primary Topic
Laser-induced spectroscopy and plasma
Type
article
Field-Weighted Citation Impact
0.27

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article

Spectral Behavior and Expansion Dynamics of Gd Plasma Generated by Dual-Pulse Laser Irradiation

Yinping Dou, Qikun Pan, Zhilin Wen, Xiaowei Song et al.
1 citations
Optics Express
Laser-induced spectroscopy and plasma
0.27
article

Spectral Behavior and Expansion Dynamics of Gd Plasma Generated by Dual-Pulse Laser Irradiation

Yinping Dou, Qikun Pan, Zhilin Wen, Xiaowei Song, Qijin Zhang, Zhuo Xie, Jingquan Lin, Fei Chen, Chaohui Wang, Bochao Li, Chongxiao Zhao
article en
1 citations

Abstract

Laser-produced gadolinium plasma (Gd-LPP) emerges as a promising candidate for next-generation nanolithography light sources. In this study, a dual laser pulse scheme was implemented to achieve a narrow spectral peak. By varying the pre-main pulse delay and pre-pulse laser energy, optimal conditions of 40 ns delay and 50 mJ energy were identified to improve spectral purity. Radiation hydrodynamics simulations revealed that the improved spectral purity stems from a flatter density gradient at the ablation front and a lower average electron density in the EUV emission region. Additionally, reheating the pre-formed plasma with a short main pulse mitigated plasma squeezing, resulting in an even lower electron density and thus improved spectral purity. Our findings suggest that spectral narrowing in the dual-pulse scheme, essential for better matching with multilayer reflection bandwidths, can be optimized through precise control of pre-pulse energy, pre-main delay, and main-pulse duration.

Optics ExpressVol. 32(21)
Chinese Academy of Sciences (CN), Changchun Institute of Optics, Fine Mechanics and Physics (CN), Shanghai Institute of Optics and Fine Mechanics (CN)
National Natural Science Foundation of China, Natural Science Foundation of Chongqing, Education Department of Jilin Province, Department of Science and Technology of Jilin Province, Higher Education Discipline Innovation Project, State Key Laboratory of Laser Interaction with Matter
Affordable and clean energy
Openalex Percentile: Top 50%
Laser-induced spectroscopy and plasma
0.27
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