A PDMS/Silicon Adhesion Control Method at Millimeter‐Scale Based on Microvibration

Switchable surface adhesion at a small scale is crucial for robot end‐effector design, allowing the manipulation of small objects such as semiconductors, optical lenses, and precision mechanical parts. In this work, a detailed characterization of a millimeter‐scale (1–5 mm) adhesion modulation method is performed, demonstrating its effectiveness for switching adhesion on small, lightweight objects with smooth surfaces. This modulation phenomenon arises from the viscoelastic behavior when PDMS interacts with a rigid surface and is controlled via microvibration. A maximum apparent adhesion enhancement of 2400% and a reduction of 50% are achieved with a 1 mm‐diameter PDMS hemisphere vibrating at a 30 μm amplitude and a 700 Hz frequency. The effects of different parameters, including size, actuation amplitude/frequency, surface roughness, and material properties, on adhesion performance are carefully measured and analyzed. A monotonic increase in maximum adhesion is observed with increased device size and surface smoothness, while nonlinear relationships of other factors are generalized with a numerical model. A long working lifespan and high endurance are also observed during the characterization. This work serves as a practical reference for the further design of small‐scale soft grippers, highlighting its continuous, large modulation range, simple structure, and flexible control.