On-Chip Antennas for IC Reliability and Aging Monitoring

We propose the use of on-chip antennas for the continuous monitoring of integrated circuit aging. We focus on detecting electromigration of interconnects using near-field EM emissions by measuring the change in differential-mode coupling between the interconnects and on-chip antennas. Simulations are performed to determine the effect of electromigration on the near-field coupling, and the on-chip antennas are fabricated and annealed to determine their compatibility with the back end of line process.