Chip-Scale Confocal Laser-Scanning Microscope Based on Optical Phased Array
We build a chip-scale confocal microscope using a 30-element optical phased array. We perform depth sensing by dynamically scanning the focal length and reconstruct 3D topology images that resolve a height difference of 8.05 μm. © 2024 The Author(s)
Authors
- Sheng-I Kuo (ORCID: https://orcid.org/0000-0002-0133-5465)
- Juwei Wang
- Zohauddin Ahmad (ORCID: https://orcid.org/0000-0003-2438-0629)
- Ping-Yen Hsieh (ORCID: https://orcid.org/0000-0002-5771-9759)
- Jin‐Wei Shi (ORCID: https://orcid.org/0000-0003-0139-514X)
- Chung-Yu Hsu
- Hsin‐Hung Lin (ORCID: https://orcid.org/0000-0001-5518-4669)
- You-Chia Chang
Institutions
- National Yang Ming Chiao Tung University (TW)
- National Central University (TW)
Publication Details
- Published
- 2024-08-04
- DOI
- https://doi.org/10.1109/cleo-pr60912.2024.10676482
- Primary Topic
- Photoacoustic and Ultrasonic Imaging
- Type
- article
- Field-Weighted Citation Impact
- 0.00