One-Shot Three-Dimensional Measurement Based on Spectral Interferometry Using a Digital Micromirror Device
We present a one-shot 3D spectral interferometry technique using a digital micromirror device. By encoding the distribution of the spatial light field, this approach enables 3D imaging of step structures within 27 ms.
Authors
- Guanhao Wu (ORCID: https://orcid.org/0000-0002-0814-2578)
- Jinxu Zhang (ORCID: https://orcid.org/0000-0001-7740-8686)
- Donglai Zhang (ORCID: https://orcid.org/0000-0002-5816-4273)
- Yingying Gu (ORCID: https://orcid.org/0000-0001-9004-1823)
- Lu Yin (ORCID: https://orcid.org/0000-0002-0357-2595)
- Liheng Shi
Institutions
- Beijing Institute of Optoelectronic Technology (CN)
- Tsinghua University (CN)
Publication Details
- Published
- 2024-08-04
- DOI
- https://doi.org/10.1109/cleo-pr60912.2024.10676754
- Primary Topic
- Optical Systems and Laser Technology
- Type
- article
- Field-Weighted Citation Impact
- 0.00