Development of 808 nm Laser-Assisted-Bonding (LAB) for Photonic System-in-Package Integration
We describe a versatile laser-assisted bonding (LAB) system for photonic system-in-package integration using an 808 nm laser. This paper details the LAB process for flip chip bonding of Si and InP PICs onto glass interposers.
Authors
- Kevin Shortiss (ORCID: https://orcid.org/0000-0002-5249-7034)
- Moritz Seyfried
- Peter O’Brien (ORCID: https://orcid.org/0000-0003-3184-3759)
- How Yuan Hwang (ORCID: https://orcid.org/0000-0002-8536-0974)
- Josué Parra-Cetina (ORCID: https://orcid.org/0000-0002-6813-4545)
Institutions
- International Energy Research Centre (IE)
Publication Details
- Published
- 2024-08-04
- DOI
- https://doi.org/10.1109/cleo-pr60912.2024.10676851
- Primary Topic
- 3D IC and TSV technologies
- Type
- article
- Field-Weighted Citation Impact
- 0.00