Design of a Si Carrier-Depletion-Type Mach-Zehnder Modulator With Ultra-Compact Photonic Crystal Slow-Light Phase Shifter

A Si Mach-Zehnder modulator using an ultra-compact photonic crystal slow-light phase shifter of 22 <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$\mu \mathrm{m}$</tex> is numerically studied. The modulator exhibits an ultra-small <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$V\pi L$</tex> of <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$4.76\times 10^{-2}\mathrm{V}\cdot \text{cm}$</tex> and clearly opened-eye at 15 Gbit/s.