Sub-Bandgap Si-Schottky Photodetectors with Cavity-Enhanced Pyramidal Absorbers
Schottky short-wavelength infrared photodetectors based on an AlSiTi-TiN-Si interface with pyramidal photonic nanostructure for reduced reflection and a decreased absorbing layer for improved internal quantum efficiency are discussed regarding spectral responsivity and dark current behaviour.
Authors
- Lion Augel (ORCID: https://orcid.org/0000-0002-8790-4736)
- J. Knobbe
Institutions
- Fraunhofer Institute for Photonic Microsystems (DE)
- Brandenburg University of Technology Cottbus-Senftenberg (DE)
Publication Details
- Published
- 2024-08-04
- DOI
- https://doi.org/10.1109/cleo-pr60912.2024.10676694
- Primary Topic
- Semiconductor Quantum Structures and Devices
- Type
- article
- Field-Weighted Citation Impact
- 0.00