Study of Nonlinear Silicon Nitride Waveguides Loss with Deuterated Silicon Dioxide Cladding
We studied the loss of low-temperature nonlinear silicon nitride waveguides with conventional and deuterated silicon dioxide cladding. The lowest and most probable losses are 0.053 dB/cm and 0.085 dB/cm for annealing-free waveguides. © 2024 The Author(s)
Authors
- Siyuan Yu
- Jiaqi Li (ORCID: https://orcid.org/0000-0003-3743-9351)
- Yanfeng Zhang (ORCID: https://orcid.org/0000-0003-4711-8690)
- Yujie Chen (ORCID: https://orcid.org/0000-0002-0778-419X)
- Yinchen Xie
Institutions
- Sun Yat-sen University (CN)
Publication Details
- Published
- 2024-08-04
- DOI
- https://doi.org/10.1109/cleo-pr60912.2024.10676682
- Primary Topic
- Engineering Technology and Methodologies
- Type
- article
- Field-Weighted Citation Impact
- 0.00
Funders
- National Natural Science Foundation of China
- National Key Research and Development Program of China