Line Spectral Reflectometry for High-Speed, Large-Area Thickness Measurement
Introducing Line Spectroscopic Reflectometry (LSR) for rapid thickness measurement over large optically transparent layers. LSR extends point measurement to lines, boosting speed by 2000 times and demonstrating inline area measurement capability. © 2024 The Author(s)
Authors
- Minchol Lee (ORCID: https://orcid.org/0000-0001-5721-4809)
- Jaehyun Park (ORCID: https://orcid.org/0000-0001-5327-9111)
- Jeongmin Kim (ORCID: https://orcid.org/0000-0002-1235-1487)
Institutions
- Seoul National University of Science and Technology (KR)
- Korea Institute of Industrial Technology (KR)
Publication Details
- Published
- 2024-08-04
- DOI
- https://doi.org/10.1109/cleo-pr60912.2024.10676438
- Citations
- 1
- Primary Topic
- Analytical Chemistry and Sensors
- Type
- article
- Field-Weighted Citation Impact
- 0.29