Low-Loss Tantalum Pentoxide Photonics Based on Damascene Process
We demonstrate a low-loss Ta<inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</inf>O<inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">5</inf> photonic platform using the Damascene process, presenting microring resonators with an intrinsic <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$Q$</tex> factor of 1.1 million and a waveguide propagation loss of 0.34 dB/cm.
Authors
- Xuetao Gan (ORCID: https://orcid.org/0000-0003-2469-5807)
- Ruixuan Yi
- Jinlong Lu (ORCID: https://orcid.org/0000-0002-5329-8483)
- Xiaotong Zhang
Institutions
- Northwestern Polytechnical University (CN)
- Ministry of Industry and Information Technology (CN)
Publication Details
- Published
- 2024-08-04
- DOI
- https://doi.org/10.1109/cleo-pr60912.2024.10676478
- Primary Topic
- Photonic and Optical Devices
- Type
- article
- Field-Weighted Citation Impact
- 0.00