Detecting Submicron-Scale Continuous Variation in Phase of AC Magnetic Field Around Micro-Circuit With Diamond Quantum Sensor
Magnetic field distribution is significant information for LSI failure analysis. In this study, we detected continuous change in phase of AC magnetic field as well as amplitude utilizing RF -dressed states of electron spins in diamond.
Authors
- Takumi Mikawa (ORCID: https://orcid.org/0009-0008-7352-4282)
- Yuichiro Matsuzaki (ORCID: https://orcid.org/0000-0001-6814-3778)
- Norikazu Mizuochi (ORCID: https://orcid.org/0000-0003-3099-3210)
- Junko Ishi‐Hayase (ORCID: https://orcid.org/0000-0002-4238-305X)
- Norio Tokuda (ORCID: https://orcid.org/0000-0003-3313-362X)
- F. Otsubo
Institutions
- Kanazawa University (JP)
- Keio University (JP)
- Kyoto University (JP)
- Kyoto University Institute for Chemical Research
- Chuo University (JP)
Publication Details
- Published
- 2024-08-04
- DOI
- https://doi.org/10.1109/cleo-pr60912.2024.10676628
- Primary Topic
- Magnetic Field Sensors Techniques
- Type
- article
- Field-Weighted Citation Impact
- 0.00