Measurement of the Excimer-Laser Ablation Threshold Using the Random Phase Plate

The ablation threshold was measured using the excimer laser and a random phase plate (RPP). The crater was the Sinc function profile determined by the pitch size of RPP. The ablation threshold can be computed from the crater diameter. © 2024 The Author(s)

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Publication Details

Published
2024-08-04
DOI
https://doi.org/10.1109/cleo-pr60912.2024.10676763
Primary Topic
Surface Roughness and Optical Measurements
Type
article
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article

Measurement of the Excimer-Laser Ablation Threshold Using the Random Phase Plate

Taisuke Miura, Osamu Konda, Hiroaki Motosugi
Surface Roughness and Optical Measurements
article

Measurement of the Excimer-Laser Ablation Threshold Using the Random Phase Plate

Taisuke Miura, Osamu Konda, Hiroaki Motosugi
article en

Abstract

The ablation threshold was measured using the excimer laser and a random phase plate (RPP). The crater was the Sinc function profile determined by the pitch size of RPP. The ablation threshold can be computed from the crater diameter. © 2024 The Author(s)

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Surface Roughness and Optical Measurements
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Measurement of the Excimer-Laser Ablation Threshold Using the Random Phase Plate — Taisuke Miura, Osamu Konda, et al. · (2024) | TGRS Research Map | TGRS