Laser Polishing of Micro-Holes in Quartz

This study investigates the viability of using laser polishing to improve the inner surface quality of micro-holes in quartz. Roughness measurements reveal a significant improvement: the initial unprocessed surface exhibited a Ra of 0.31 μm, which was reduced to 0.08 <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$\mu \mathrm{m}$</tex> after laser polishing. The residual stress induced in the internally polished areas of the quartz holes by laser polishing is negligible..