Imaging Analysis Method for a Paraxial Refractive Optical System with a Large Aperture Based on the Wave Aberration Method

Recently developed sixth-order wave aberration expressions of soft X-rays and a vacuum ultraviolet optical system are first extended to plane-symmetric refractive optical systems, and then, applying the transformation relations between plane-symmetric and paraxial refractive optical system, the sixth-order intrinsic and extrinsic wave aberration coefficient expressions of a paraxial refractive optical system are derived. In addition, the corresponding fifth-order aberration expressions are also obtained. Finally, the resultant aberration expressions are applied to calculate the aberration on the image plane of one design example of a paraxial refractive optical system with a large aperture, and these calculation results are compared with ones obtained by ray-tracing software Zemax to prove that they have satisfactory calculation accuracy.