Design and Control of Piezo-driven Planar 3-DOFs Fully Decoupled Compliant Platform

At present,The demand for planar multi-DOFs and high-precision flexible micro-positioning platforms is currently on the rise, particularly in the field of ultra-precision machining. To enhance the robust property of proposed parallel structure micro-positioning platform based on piezoelectric ceramic actuator, adaptive sliding mode control method is designed and controlled in this article. The hysteresis characteristic of piezoelectric actuators is described by Bouc-Wen model. Then, the control precision of positioning platform is improved by using adaptive sliding mode control strategy. To demonstrate the advantages of the selected method, PID and sliding mode control methods without adaptive control laws are simulated as the reference methods. The analytical results express the tracking error of the selected controller is under 2%, and tracking accuracy is the best Experimental equipment is also set up to test and evaluate the performance of the proposed positioning platform to express that the proposed compliant mechanism obtains the excellent motion characteristic.