A Semi-Automatic Tool for the Extraction of RF-Plasmas Parameters by Langmuir Probe

MEMS/NEMS and Integrated circuits technology are direct related to the advance of plasma assisted processes. Cold plasmas can be electrically characterized by the employment of Langmuir probes due to its versatility and low-cost. One can measure the following electrical parameters of plasma: electron temperature, plasma density, floating potential and plasma potential. This work reports a numerical tool, for a semi-automatic analysis of a characteristic curve, resulting from a Langmuir probe measurements on RF plasmas (13.56 MHz). This automation consists of data acquisition and signal conditioning via LabView<sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">®</sup>software, followed by numerical processing via Matlab<sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">®</sup>software. The results show the effectiveness of the tool for data analisys and obtained results.