Interdigitated-comb piezoelectric phononic crystals for innovative SAW devices
In this paper, piezoelectric phononic crystals made up of interdigitated combs in floating potential condition are studied. Calculation of the dispersion curves shows that, in addition to Bragg bandgaps due to the presence of periodic electrodes, supplementary bandgaps are present corresponding to electrical resonance/antiresonance of the comb pairs. Calculation of the reflection coefficient of finite-sized mirrors reveals the presence of high amplitude reflection coefficient lobes near these bandgap frequencies. The electrical response of single port resonators using these interdigitated comb mirrors fabricated with Al metallization on LiTaO3 POI substrate is contrasted with that of a resonator with classical mirrors, providing experimental verification of this mechanism for bandgap opening. Possible applications for SAW device design are finally discussed.
Authors
- Charles Croënne (ORCID: https://orcid.org/0000-0002-8826-3918)
- R. Alcorta Galván (ORCID: https://orcid.org/0000-0002-0637-3022)
- Étienne Eustache (ORCID: https://orcid.org/0009-0006-8651-5540)
- Anne-Christine Hladky (ORCID: https://orcid.org/0000-0001-6339-8448)
- Bertrand Dubus (ORCID: https://orcid.org/0000-0003-2226-8852)
- Albert Ngabonziza
Institutions
- Centre National de la Recherche Scientifique (FR)
- École Polytechnique (FR)
- Université de Lille (FR)
- Institut d'Electronique, de Microélectronique et de Nanotechnologie (FR)
- Laboratoire de Mécanique et d’Acoustique (FR)
- Université Polytechnique Hauts-de-France (FR)
Publication Details
- Journal
- Applied Physics Letters
- Published
- 2024-09-16
- DOI
- https://doi.org/10.1063/5.0222994
- Citations
- 3
- Primary Topic
- Acoustic Wave Phenomena Research
- Type
- article
- Field-Weighted Citation Impact
- 0.55
Funders
- Agence Nationale de la Recherche