Flexible Superconducting Wiring for Integration with Low-Temperature Detector and Readout Fabrication
We present a method of creating high-density superconducting flexible wiring on flexible thin silicon substrates. The flexible wiring, called <i>SOI flex</i>, is created by depositing superconducting wiring on a silicon-on-insulator (SOI) wafer, selectively etching away the thicker silicon section <i>handle</i> layer, and bending the thinner silicon <i>device</i> layer. We show measurements of superconducting transition temperature and critical current for Mo, Nb, and Al on SOI flex. We discuss the expected advantages of SOI flex for low-temperature detector applications, as well as the role of stress and strain in bent silicon and niobium.
Authors
- D. R. Schmidt
- Daniel S. Swetz (ORCID: https://orcid.org/0000-0002-8192-2175)
- W. B. Doriese (ORCID: https://orcid.org/0000-0003-1107-6441)
- Mark W. Keller (ORCID: https://orcid.org/0000-0001-8573-2953)
- Joel N. Ullom (ORCID: https://orcid.org/0000-0003-2486-4025)
- Leila R. Vale (ORCID: https://orcid.org/0000-0001-8561-2580)
- J. A. B. Mates
- G. C. O’Neil (ORCID: https://orcid.org/0000-0003-3450-2263)
- Joel C. Weber (ORCID: https://orcid.org/0000-0001-9972-0208)
- Robinjeet Singh (ORCID: https://orcid.org/0000-0003-2893-9039)
- Avirup Roy (ORCID: https://orcid.org/0000-0002-9156-8851)
- Kelsey M. Morgan (ORCID: https://orcid.org/0000-0002-6597-1030)
- Michael Vissers
Institutions
- National Institute of Standards and Technology (US)
- University of Colorado Boulder (US)
Publication Details
- Journal
- Journal of Low Temperature Physics
- Published
- 2024-09-14
- DOI
- https://doi.org/10.1007/s10909-024-03209-8
- Citations
- 1
- Primary Topic
- Superconducting and THz Device Technology
- Type
- article
- Field-Weighted Citation Impact
- 0.33
Funders
- National Institutes of Health