High groove density diffraction grating replication based on UV composite rolling technology

The preparation technology of high groove density gratings is generally complex and costly, while nanoimprint technology has the ability to prepare large quantities of high-precision micro-nano structures. Therefore, nanoimprint technology is used to study the replication process of grazing incidence high groove density gratings used in Littman-type external cavity semiconductor lasers (ECDL). A UV composite rolling technology is used to imprint the high groove density grating groove area on the ULE glass substrate, and the grating replication is completed after coating. Replicated grating performance was tested and characterized with high fidelity.