Design and simulation analysis of multistage compliant amplifier towards piezoelectric micro-gripper

As the end effector of micro-operated robot, micro-clamp mechanism is often used for micro-assembly and micro-operation of small objects. It is widely used in micro-operation, medical, aerospace, precision instruments and other fields. Aim to solve the problems of small clamping range and large structure size in the existing micro-clamp device, a multistage flexibility amplifying device for series piezoelectric micro-clamp is designed using single piezoelectric ceramic as the displacement driving source of micro-clamp. The static and dynamic modeling is carried out. The finite element analysis of the multistage compliance amplifier is carried out, and the correctness of its theoretical model is verified. The wide range of clamping and stable parallel clamping of the left and right clamp arms are realized. The experimental results show that the magnification is 19.62, and the clamping range of 333.57μm can be completed. The designed micro-clamp has good dynamic performance, symmetrical and compact, large clamping range, low coupling, and can complete the high-precision submicron level clamping and releasing tasks.