Effects of residual oxygen on superconducting niobium films

The integration of niobium (Nb) into emerging superconducting circuits can enhance their performance and function. However, growth of high purity Nb can be challenging due to its high reactivity with oxygen. Here, we examine the role of residual oxygen inside the growth chamber in transforming the structural, chemical, and superconducting properties of Nb films. We demonstrate that an increase in unintentional oxygen impurities lowers the superconducting critical temperature of Nb. This evolution coincides with the reduction of Nb crystal domains, which are separated by highly disordered oxygen-rich regions. Moreover, chemical analysis reveals the formation of niobium monoxide within the film during growth. These findings provide a comprehensive picture of how residual oxygen in the growth chamber can affect the properties of the Nb films. This study contributes to the materials science and engineering knowledge of superconducting Nb growth.