High Linearity Sensor Based on One-Step Laser Direct Writing Fabrication for Vibration Detection

Vibration sensors are involved extensively in machinery health monitoring applications. However, their low cost and simple fabrication to realize reliable monitoring remains a great challenge. Herein, a vibration sensor mainly consisting of a middle-suspended resistive Ag/PDMS/PVC membrane is proposed. To enhance the sensor’s sensitivity, microcone arrays are fabricated on the surface of PDMS by laser direct writing and followed by coated Ag ink. The tops of microcones suffer from small pressure applied by the top electrode to make sure that the conducting paths from the top to the bottom electrode remain available even when the membrane oscillates up and down. It is demonstrated that the developed sensor can detect vibrations with frequencies ranging from 1 to 400 Hz and acceleration ranging from 1 to 10 g, as well as a linearity of 0.9806 between the voltage signal and acceleration. The sensor can be utilized for vibration detection in areas such as the air compressor, air blower, shield cut head, etc. to assess the working conditions of the machinery. The sensor shows merits like easy microstructure fabrication, facile multilayer assembly, and low cost, which indicate its great application potential in vibration monitoring of common machines with rotating or oscillating parts.