True Random Number Generator Based on Chaotic Oscillation of a Tunable Double‐Well MEMS Resonator

Chaotic systems have aroused interest across various scientific disciplines such as physics, biology, chemistry, and meteorology. The deterministic but unpredictable nature of a chaotic system is an ideal feature for random number generation. Microelectromechanical systems (MEMS) are a promising technology that effectively harnesses chaos, offering advantages such as a compact footprint, scalability, and low power consumption. This paper presents a true random number generator (TRNG) based on a double-well MEMS resonator integrated with an actuator and position sensor. The potential energy landscape of the proposed MEMS resonator is actively tunable with a direct current voltage. Experimental demonstrations of tunable bistability and chaotic resonance are reported in this paper. A chaotic time sequence is generated through piezoresistive sensing of the position of the MEMS resonator once it is driven into the chaotic regime. Subsequently, the randomness of the bit sequence, achieved by applying the exclusive or function to a digital chaotic sequence and its delayed differential is confirmed to meet the National Institute of Standards and Technology specifications. Moreover, the throughput and energy efficiency of the proposed MEMS-based TRNG can be adjusted from 50 kb s^-1 and 0.44 pJ per bit at a low energy barrier to 167 kb s^-1 and 6.74 pJ per bit at a high energy barrier by changing the MEMS device's potential well. The tunability of the proposed double-well MEMS resonator not only offers continuous adjustments in the energy efficiency of TNRG but also unveils vast and diverse research opportunities in analog computing, encryption, and secure communications.