Development Status of Key Technologies for Optoelectronic Integrated Circuit Manufacturing
Optoelectronic integrated circuit (OEIC) technology has attracted considerable research attention. Studies have achieved numerous breakthroughs in the basic scientific problems, key technologies, demonstration applications, and industrial promotions of OEIC. This study details the technical process, development status, existing problems, and future research trends of the design, manufacturing, and packaging of OEIC to provide a systematic summary of OEIC technology.
Authors
- Xiang Lü (ORCID: https://orcid.org/0000-0003-1633-4446)
- Lingling Peng (ORCID: https://orcid.org/0000-0002-1930-9919)
- Dunkui Chen
- Lang Chen (ORCID: https://orcid.org/0000-0003-1210-271X)
- Chi Zhang (ORCID: https://orcid.org/0000-0001-9388-675X)
- Ying‐Chun Chen (ORCID: https://orcid.org/0000-0002-1273-6483)
- Ji Fang (ORCID: https://orcid.org/0000-0002-3684-1608)
- Mengjie Liang
Institutions
- Huazhong University of Science and Technology (CN)
Publication Details
- Journal
- Applied Sciences
- Published
- 2024-09-09
- DOI
- https://doi.org/10.3390/app14178073
- Citations
- 3
- Primary Topic
- Photonic and Optical Devices
- Type
- article
- Field-Weighted Citation Impact
- 0.63