High-Extraction-Rate Ta2O5-Core/SiO2-Clad Photonic Waveguides on Silicon Fabricated by Photolithography-Assisted Chemo-Mechanical Etching (PLACE)
We demonstrate high-extraction-rate Ta<sub>2</sub>O<sub>5</sub>-core/SiO<sub>2</sub>-clad photonic waveguides on silicon fabricated by the photolithography-assisted chemo-mechanical etching technique. Low-confinement waveguides of larger than 70% coupling efficiency with optical fibers and medium propagation loss around 1 dB/cm are investigated in the experiment. Monolithic microring resonators based on Ta<sub>2</sub>O<sub>5</sub> waveguides have shown the quality factors to be above 10<sup>5</sup> near 1550 nm. The demonstrated Ta<sub>2</sub>O<sub>5</sub> waveguides and their fabrication method hold great promise in various cost-effective applications, such as optical interconnecting and switching.
Authors
- Youting Liang
- Chao Sun (ORCID: https://orcid.org/0000-0001-7627-0902)
- Haisu Zhang (ORCID: https://orcid.org/0000-0001-7823-6257)
- Jianglin Guan (ORCID: https://orcid.org/0000-0002-5272-8832)
- Lang Gao (ORCID: https://orcid.org/0000-0001-7120-1924)
- Zhiwei Fang (ORCID: https://orcid.org/0000-0002-8047-1763)
- Min Wang (ORCID: https://orcid.org/0000-0001-5321-3323)
- Zhe Wang (ORCID: https://orcid.org/0000-0003-4102-1353)
- Jian Liu (ORCID: https://orcid.org/0000-0001-8057-2444)
- Ya Cheng (ORCID: https://orcid.org/0000-0001-8269-5907)
- Zhaoxiang Liu (ORCID: https://orcid.org/0000-0002-1267-0277)
Institutions
- Shanxi University (CN)
- Chinese Academy of Sciences (CN)
- Shandong Normal University (CN)
- Hefei University (CN)
- Shanghai Institute of Optics and Fine Mechanics (CN)
- East China Normal University (CN)
Publication Details
- Journal
- Nanomaterials
- Published
- 2024-09-09
- DOI
- https://doi.org/10.3390/nano14171466
- Citations
- 2
- Primary Topic
- Photonic and Optical Devices
- Type
- article
- Field-Weighted Citation Impact
- 0.42
Funders
- National Natural Science Foundation of China
- Science and Technology Commission of Shanghai Municipality
- National Key Research and Development Program of China
- Fundamental Research Funds for the Central Universities