Deep learning enabled design of terahertz high-Q metamaterials

• We proposed novel solutions for designing terahertz high-Q metamaterials based on deep learning . • We achieved highly accurate inverse design of structural parameters according to the target spectra. • We realized rapid and precise prediction of the high-Q spectra from given structural parameters. Metamaterials open up a new way to manipulate electromagnetic waves and realize various functional devices. Metamaterials with high-quality factor (Q) resonance responses are widely employed in sensing, detection, and other applications. Traditional design of metamaterials involves laborious simulation-optimization and limits the efficiency. The high-Q metamaterials with abrupt spectral change are even harder to reverse design on-demand. In this paper, we propose novel solutions for designing terahertz high-Q metamaterials based on deep learning , including the inverse design of structural parameters and the forward prediction of spectral responses. For the inverse design, we introduce the big data Visual Attention Network (VAN) model with a large model capability, and take additional parameter tuning for the key sensitive parameters and predict them individually, which can efficiently reduce errors and achieve highly accurate inverse design of structural parameters according to the target high-Q resonance responses. For the forward prediction, we develop the Electromagnetic Response Transformer (ERT) model to establish the complex mapping relations between the highly sensitive structural parameters and the abrupt spectra, and realize precise prediction of the high-Q resonance in terahertz spectra from given structural parameters. Our ERT model can be 4000 times faster than the conventional full wave simulations in computation time. Both models exhibit outstanding performance, and the accuracy is improved one or two orders higher compared to the traditional machine learning methods. Our work provides new avenues for the deep learning enabled design of terahertz high-Q metamaterials, which holds potential applications in various fields, such as terahertz communication, sensing, imaging, and functional devices.