Imaging advance enables 3D maps of the smallest microchips
With improved x-ray tomography algorithms, researchers can analyze nanometer-scale features inside microchips and improve resolution in other imaging applications.
Authors
- Laura Fattaruso
Publication Details
- Journal
- Physics Today
- Published
- 2024-08-30
- DOI
- https://doi.org/10.1063/pt.ufct.fedr
- Primary Topic
- Advanced X-ray Imaging Techniques
- Type
- article
- Field-Weighted Citation Impact
- 0.00