10 × 10 Ga₂O₃-based solar-blind UV detector array and imaging characteristic

Abstract A 10 × 10 solar-blind ultraviolet (UV) imaging array with double-layer wire structure was prepared based on Ga 2 O 3 film grown by atomic layer deposition. These single detection units in the array exhibit excellent performance at 3 V: photo-to-dark current ratio (PDCR) of 5.5 × 10 5 , responsivity ( R ) of 4.28 A/W, external quantum efficiency (EQE) of 2.1 × 10 3 %, detectivity ( D * ) of 1.5 × 10 14 Jones, and fast response time. The photodetector array shows high uniformity under different light intensity and low operating bias. The array also has good temperature stability. Under 300 °C, it still presents clear imaging and keeps high R of 34.4 and 6.45 A/W at 5 and 1 V, respectively. This work provides a new insight for the large-scale array of Ga 2 O 3 solar-blind UV detectors.