Optimization of the Femtosecond Laser Machining Process for Single Crystal Diamond Using Response Surface Methodology

Femtosecond laser machining offers high precision and minimal thermal impact, making it a promising technique for processing hard and brittle materials like single-crystal diamonds (SCDs). In this study, the femtosecond laser machining process for SCD material was systematically optimized to improve both machining efficiency and quality. Initial single-factor experiments were conducted to explore the effects of key process parameters—laser power, scanning speed, and number of scans—on machining performance. Subsequently, response surface methodology (RSM)-based experiments designed using the Box–Behnken method were employed to comprehensively refine the process. A regression model was developed to analyze the data, and the interaction effects of the parameters were thoroughly evaluated. The validated model identified an optimal set of parameters, resulting in a significant improvement in machining performance. This research provides a comprehensive framework for optimizing femtosecond laser machining processes, offering valuable insights critical for the production of advanced lightweight components in industries such as aerospace, optical instruments, and high-performance electronics.