Polarity of homoepitaxial ZnO films grown by Nd:YAG pulsed laser deposition
We investigate the stability of the polar surface of ZnO films grown homoepitaxially on atomically flat ZnO (0001¯) O-face substrates by neodymium yttrium aluminum garnet (Nd:YAG) pulsed laser deposition (PLD). For films grown in the temperature range from 500 to 700 °C, ion scattering spectroscopy showed that the film surface termination was the same as the ZnO substrate. Even for a Mg0.2Zn0.8O/ZnO superlattice, no polarity reversal occurred, indicating that the ZnO (0001¯) O-face is highly stable, despite the film surface sputtering caused by the high kinetic energy of the PLD plume generated by the Nd:YAG laser.
Authors
- Mikk Lippmaa
- Iwao Hosako (ORCID: https://orcid.org/0000-0002-9270-4245)
- Norihiko Sekine (ORCID: https://orcid.org/0000-0002-5921-4703)
- Toshihiro Sato (ORCID: https://orcid.org/0000-0002-8807-2417)
- Takuro Dazai (ORCID: https://orcid.org/0009-0005-2697-9303)
- Ryota Takahashi (ORCID: https://orcid.org/0000-0003-2430-2444)
- Tatsuya Masuda (ORCID: https://orcid.org/0009-0003-7717-2994)
- Hideomi Koinuma
Institutions
- Nihon University (JP)
- The University of Tokyo (JP)
- National Institute of Information and Communications Technology (JP)
Publication Details
- Journal
- Journal of Applied Physics
- Published
- 2024-09-03
- DOI
- https://doi.org/10.1063/5.0223495
- Citations
- 4
- Primary Topic
- ZnO doping and properties
- Type
- article
- Field-Weighted Citation Impact
- 0.47
Funders
- JST-Mirai Program