Application of Cr-N and Fe-Pd Thin Films to Tactile Sensors for Simultaneous Strain and Temperature Measurement

The authors have studied a tactile sensor that simultaneously detects strain and temperature. In this paper, we used a Cr-N alloy thin film with high strain sensitivity and low temperature sensitivity and Fe-Pd with high temperature sensitivity and low strain sensitivity as strain and temperature sensors for a composite tactile sensor. We prototyped the composite tactile sensor, conducted simultaneous application tests of strain (load) and temperature, and discussed correction methods to improve detection accuracy. The fabricated composite tactile sensor enabled simultaneous measurement of strain (load) and temperature. We also confirmed that it is possible to compensate for each other in real time through simple calculations, without the need for a special compensation circuit by using two thin films with the above characteristics.