Combined magnetron sputtering and laser annealing process for the fabrication of proton conducting thin films

Acceptor doped barium zirconates are known for their exceptional protonic conductivity and the challenges in their fabrication. Within this work, BaZr0.8Y0.2O3-δ (BZY20) films were successfully deposited on a BaZr0.7Ce0.2Y0.1O3-δ/Ni (BZCY72/Ni) substrate using a combination of closed-field unbalanced magnetron sputtering and various annealing techniques such as conventional furnace annealing and laser annealing. Thin films could be tempered at only 800 °C with an additional laser annealing step and exhibit a heigh density as well as a sufficient protonic conductance. The highest measured ionic conductivity was 1.11*10−3 S/cm. The provided synthesis could pave the way for employing metallic supports in protonic ceramic fuel cells by using lower sintering temperatures than normally required.

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Publication Details

Journal
Vacuum
Published
2024-08-30
DOI
https://doi.org/10.1016/j.vacuum.2024.113582
Citations
3
Primary Topic
Advancements in Solid Oxide Fuel Cells
Type
article
Field-Weighted Citation Impact
0.35

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article

Combined magnetron sputtering and laser annealing process for the fabrication of proton conducting thin films

H. Wulff, Janus A. C. Wartmann, Angela Kruth, Annette‐Enrica Surkus et al.
3 citations
Vacuum
Advancements in Solid Oxide Fuel Cells
0.35
article

Combined magnetron sputtering and laser annealing process for the fabrication of proton conducting thin films

H. Wulff, Janus A. C. Wartmann, Angela Kruth, Annette‐Enrica Surkus, Jan Wallis, Olga Ravkina, Fee Käufer, Robin von Mallinckrodt
article en
3 citations

Abstract

Acceptor doped barium zirconates are known for their exceptional protonic conductivity and the challenges in their fabrication. Within this work, BaZr0.8Y0.2O3-δ (BZY20) films were successfully deposited on a BaZr0.7Ce0.2Y0.1O3-δ/Ni (BZCY72/Ni) substrate using a combination of closed-field unbalanced magnetron sputtering and various annealing techniques such as conventional furnace annealing and laser annealing. Thin films could be tempered at only 800 °C with an additional laser annealing step and exhibit a heigh density as well as a sufficient protonic conductance. The highest measured ionic conductivity was 1.11*10−3 S/cm. The provided synthesis could pave the way for employing metallic supports in protonic ceramic fuel cells by using lower sintering temperatures than normally required.

VacuumVol. 229
Universität Greifswald (DE), Leibniz Institute for Plasma Science and Technology (DE), Leibniz Institute for Catalysis (DE), Fraunhofer Institute for Ceramic Technologies and Systems (DE), The Hydrogen and Fuel Cell Center (DE)
Bundesministerium für Bildung, Wissenschaft, Forschung und Technologie, Projektträger Jülich
Openalex Percentile: Top 45%
Advancements in Solid Oxide Fuel Cells
0.35
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Combined magnetron sputtering and laser annealing process for the fabrication of proton conducting thin films — H. Wulff, Janus A. C. Wartmann, et al. · Vacuum (2024) | TGRS Research Map | TGRS