Evaluation of highly sensitive vibration states of nanomechanical resonators in liquid using a convolutional neural network

Nanomechanical resonators can detect various small physical quantities with high sensitivity using changes in resonant properties. However, viscous damping in liquids significantly reduces the measurement sensitivity. This study proposes convolutional neural network (CNN) vibration spectrum analysis to evaluate the highly sensitive vibration states of nanomechanical resonators, which are useful for in-liquid measurements. This research was carried out through the measurement of acetone concentration. First, we compared the concentration classification ability between the proposed and conventional methods and determined that the proposed method of analyzing vibration spectral changes using the CNN model can provide higher measurement sensitivity than the conventional measurement method of observing resonance properties changes and comparing the values for each measurement condition. This result shows that CNN-based spectral analysis is effective for the vibration spectra of in-liquid measurements. Next, gradient-weighted class activation mapping (Grad-CAM) was applied to verify which frequency bands are important for concentration classification in CNN model decision-making. The vibration states in these frequency bands were analyzed in terms of oscillation modes. This analysis revealed significant oscillation modes of the nanomechanical resonator in the liquid environment. Notably, in addition to the resonance states utilized in the conventional method, several other oscillation modes were found to be significant for measurements. This finding suggests that these oscillation modes may be highly sensitive for measurements in liquid environments. Among these oscillation modes, the mode with very small amplitude is highly promising for achieving unprecedented levels of sensitivity in sensing technologies. All figures in this submission are intended to be printed in color. • Highly sensitive vibrations were evaluated for nanomechanical resonators in liquids. • Vibration analysis by CNN was effective for in-liquid measurement of the resonator. • Grad-CAM was effective in identifying useful frequencies for in-liquid measurements. • Very small amplitude oscillation modes showed sensitivity to physical quantities.