MEMS‐enabled Ultralow Power Consumption Programmable Arbitrary Order Mode Switch

Abstract Mode‐division‐multiplexing (MDM) recently attracted much interest due to its ability to enhance the capacity for optical information communication. To meet growing data transmission demands and enable flexible on‐chip mode manipulation, programmable optical mode converter switches are essential. This work introduces a micro‐electromechanical‐system (MEMS)‐enabled programmable arbitrary order mode switch, capitalizing on the benefits of MEMS technology such as low power consumption, robust modulation capabilities, and seamless large‐scale integration. Employing newly developed MEMS‐tunable mode converter (MTMC) units, the system achieves high conversion efficiencies from the fundamental mode to arbitrary higher‐order modes and supports programmable power distribution among different modes by cascading multiple MTMCs. As a proof‐of‐concept, a programmable TE 0 –TE 0/1/2 mode switch operates in the 3.64 to 3.71 µm wavelength range, achieving maximum crosstalk values of –9.56 and –9.88 dB for TE 0 to TE 1 and TE 0 to TE 2 mode conversion, respectively, and a remarkably low power consumption of 67 pW. Furthermore, a programmable mode multiplexer is developed by simultaneously actuating two MEMS actuators to modulate phase matching conditions, enabling arbitrary power splitting ratios among these modes. The demonstrated scalability and flexibility of the proposed system highlight its potential as a foundational component for MDM systems.